New voltage contrast imaging method for detection of electrical failures

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3998, Issue , 2000, Pages 599-606

  Nozoe, Mari ^a   Nishiyama, Hidetoshi ^a   Shinada, Hiroyuki ^a   Tanaka, Maki ^a  

^a HITACHI LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON BEAMS; IMAGING TECHNIQUES; SCANNING; SILICON WAFERS;

ELECTRICAL FAILURE DETECTION; VOLTAGE CONTRAST IMAGING METHOD;

LITHOGRAPHY;

EID: 0033688457     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (2)