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Journal of the Electrochemical Society

Volumn 149, Issue 7, 2002, Pages

Corrosion behavior of stainless steel and aluminum in a downstream environment of CF4/O2 microwave plasma

(5) Hara, Nobuyoshi a Mukuhara, Shingo a Ohtomo, Katsuhisa a Shimizu, Yasufumi a Sugimoto, Katsuhisa a

a TOHOKU UNIVERSITY (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM CORROSION; IRON COMPOUNDS; MASS SPECTROMETRY; METALLIC FILMS; MICROWAVES; NICKEL COMPOUNDS; PLASMAS; STAINLESS STEEL; STEEL CORROSION; SURFACE REACTIONS; THERMAL EFFECTS;

MICROWAVE PLASMAS;

CORROSIVE EFFECTS;

EID: 0036641876 PISSN: 00134651 EISSN: None Source Type: Journal
DOI: 10.1149/1.1479157 Document Type: Article

Times cited : (6)

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