Corrosion behavior of metals and alloys in downstream environment of microwave plasma with CF4/O2 gas mixture

Zairyo to Kankyo/ Corrosion Engineering

Volumn 47, Issue 2, 1998, Pages 136-145

  Ohtsuki, Eiji ^a   Nakafuji, Atsushi ^a   Akao, Noboru ^a   Kara, Nobuyoshi ^a   Miyasaka, Matsuho ^b   Sugimoto, Katsuhisa ^a  

^a TOHOKU UNIVERSITY   (Japan)

^b EBARA CORPORATION   (Japan)

Author keywords

Auger electron spectroscopy; CF4 O2 plasma; Corrosion; Fluorine atom; Metal fluoride; Metal oxyfluoride; Pure metal; Stainless steel

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; FLUORINE COMPOUNDS; HIGH TEMPERATURE EFFECTS; MATERIALS TESTING; METALS; NICKEL ALLOYS; PLASMA APPLICATIONS; SPUTTERING; STAINLESS STEEL; THIN FILMS; VAPOR PRESSURE;

DOWNSTREAM REACTORS; METAL FLUORIDES; MICROWAVE PLASMA;

CORROSION;

EID: 0031991983     PISSN: 09170480     EISSN: None     Source Type: Journal    
DOI: 10.3323/jcorr1991.47.136     Document Type: Article

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