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Journal of Applied Physics

Volumn 92, Issue 1, 2002, Pages 635-637

Direct measurement of contact temperature using Seebeck potential

(2) Liao, C N a Tu, K N b

a NATIONAL TSING HUA UNIVERSITY (Taiwan)

b UNIVERSITY OF CALIFORNIA (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CONTACT AREAS; CONTACT TEMPERATURE; CONVENTIONAL METHODS; DIRECT MEASUREMENT; FEATURE SIZES; INTEGRATED CIRCUIT TECHNOLOGY; RC DELAY; SEEBECK; SUBMICRON; TEST STRUCTURE;

JOULE HEATING;

SILICON;

EID: 0036640194 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.1485107 Document Type: Article

Times cited : (5)

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