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Volumn 507-510, Issue , 2002, Pages 357-361
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Roughening aspects of room temperature vapor deposited oligomer thin films onto Si substrates
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Author keywords
Growth; Silicon; Surface roughening
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Indexed keywords
ATOMIC FORCE MICROSCOPY;
DIFFUSION;
OLIGOMERS;
OPTOELECTRONIC DEVICES;
SEMICONDUCTING SILICON;
SUBSTRATES;
THIN FILMS;
VAPOR DEPOSITION;
PHOTONIC DEVICES;
SURFACE ROUGHNESS;
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EID: 0036609198
PISSN: 00396028
EISSN: None
Source Type: Journal
DOI: 10.1016/S0039-6028(02)01271-2 Document Type: Conference Paper |
Times cited : (19)
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References (26)
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