Analytical UHV transmission electron microscopy studies of electronic structure changes between as-deposited Mn and Mn silicide on Si(1 1 1) surface

Surface Science

Volumn 507-510, Issue , 2002, Pages 453-457

  Zhang, Qi ^a   Tanaka, Miyoko ^a   Takeguchi, Masaki ^a   Furuya, Kazuo ^a  

^a NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

Author keywords

Electron energy loss spectroscopy (EELS); Electron microscopy; Manganese; Surface structure, morphology, roughness, and topography

Indexed keywords

ANNEALING; CRYSTAL STRUCTURE; DEPOSITION; ELECTRON ENERGY LOSS SPECTROSCOPY; EPITAXIAL GROWTH; MANGANESE; MORPHOLOGY; SEMICONDUCTING SILICON; SURFACE ROUGHNESS; TRANSMISSION ELECTRON MICROSCOPY;

MANGANESE SILICIDES;

ELECTRONIC STRUCTURE;

EID: 0036609133     PISSN: 00396028     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0039-6028(02)01403-6     Document Type: Conference Paper

References (25)