Ion-assisted deposition of moisture-stable hafnium oxide films for ultraviolet applications

Applied Optics

Volumn 41, Issue 16, 2002, Pages 3205-3210

  Jensen, Traci R ^a   Warren, John ^a   Johnson, Robert L ^a  

^a Omega Optical Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0036603104     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.41.003205     Document Type: Article

References (11)

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