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Volumn 22, Issue 3, 2002, Pages 175-179

Structure and tribological properties of TiN coatings deposited with two different PVD methods

Author keywords

Coatings; Filtered cathodic arc plasma; Nano indentation; Performance; PVD; Structure; TiN

Indexed keywords

FRICTION; MAGNETRON SPUTTERING; PHYSICAL VAPOR DEPOSITION; PLASMAS; STAINLESS STEEL; TITANIUM NITRIDE; WEAR RESISTANCE;

EID: 0036587954     PISSN: 10040595     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article
Times cited : (9)

References (8)
  • 1
    • 0030257171 scopus 로고    scopus 로고
    • Effect of stress state in different TiN films on their tribological performances
    • Zhuang Daming, Liu Jiajun, Zhu Baoliang. Effect of stress state in different TiN films on their tribological performances[J]. Tribology, 1996, 16(4):312-321.
    • (1996) Tribology , vol.16 , Issue.4 , pp. 312-321
    • Zhuang, D.1    Liu, J.2    Zhu, B.3
  • 2
    • 0033417558 scopus 로고    scopus 로고
    • Synthesis of hard TiN coatings with suppressed columnar growth and reduced stress
    • Lacerda M M, Chen Y H, Zhou B, et al. Synthesis of hard TiN coatings with suppressed columnar growth and reduced stress[J]. J Vac Sci Technol A, 1999, 17(2):2915-2919.
    • (1999) J. Vac. Sci. Technol. A , vol.17 , Issue.2 , pp. 2915-2919
    • Lacerda, M.M.1    Chen, Y.H.2    Zhou, B.3
  • 3
    • 0022080421 scopus 로고
    • Structure and properties of TiN coatings
    • Sundgren J E. Structure and properties of TiN coatings[J]. Thin Solid Films, 1985, 128:21-44.
    • (1985) Thin Solid Films , vol.128 , pp. 21-44
    • Sundgren, J.E.1
  • 4
    • 0010904712 scopus 로고    scopus 로고
    • Measurement of bonding strength of magnetic sputtered TiN coating by indentation method
    • Wei Xicheng, Li Jian, Yuan Chengqing. Measurement of bonding strength of magnetic sputtered TiN coating by indentation method[J]. Tribology, 2000, 20(3):229-231.
    • (2000) Tribology , vol.20 , Issue.3 , pp. 229-231
    • Wei, X.1    Li, J.2    Yuan, C.3
  • 5
    • 0030146592 scopus 로고    scopus 로고
    • Control of film properties during filtered arc deposition
    • Martin P J, Bendavid A, Kinder T J. Control of film properties during filtered arc deposition[J]. Surf Coat Technol, 1996, 81:36-41.
    • (1996) Surf. Coat. Technol. , vol.81 , pp. 36-41
    • Martin, P.J.1    Bendavid, A.2    Kinder, T.J.3
  • 6
    • 0034599699 scopus 로고    scopus 로고
    • Comparison of filtered high-current pulsed arc deposition (f-HCA) with conventional vacuum arc methods
    • Witke T, Schuelke T, Schultrich B, et al, Comparison of filtered high-current pulsed arc deposition (f-HCA) with conventional vacuum arc methods[J]. Surf Coat Technol, 2000, 126:81-88.
    • (2000) Surf. Coat. Technol. , vol.126 , pp. 81-88
    • Witke, T.1    Schuelke, T.2    Schultrich, B.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.