Effect of stress state in different TiN-films on their tribological performances

Mocaxue Xuebao/Tribology

Volumn 16, Issue 4, 1996, Pages 312-321

  Zhuang, Daming ^a   Liu, Jiajun ^a   Zhu, Baoliang ^a  

^a TSINGHUA UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

INORGANIC COATINGS; RESIDUAL STRESSES; THIN FILMS; TITANIUM NITRIDE; VAPOR DEPOSITION; WEAR RESISTANCE;

FRICTION WEAR; INTERNAL STRESS; PHYSICAL VAPOR DEPOSITION;

FRICTION;

EID: 0030257171     PISSN: 10040595     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (27)