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Zeitschrift fuer Metallkunde/Materials Research and Advanced Techniques

Volumn 93, Issue 5, 2002, Pages 401-405

Grain growth in magnetron-sputtered nickel films

(2) Wagner, Thomas a Muller D a

a MAX PLANCK INSTITUTE FOR INTELLIGENT SYSTEMS (Germany)

Author keywords

Grain growth; Nickel; PVD; Sputtering

Indexed keywords

ANNEALING; GRAIN GROWTH; MAGNETRON SPUTTERING; MICROSCOPIC EXAMINATION; PHYSICAL VAPOR DEPOSITION; SILICON WAFERS; TEXTURES; THERMAL EFFECTS; VACUUM APPLICATIONS; X RAY DIFFRACTION ANALYSIS;

MAGNETRON-SPUTTERED NICKEL FILMS;

METALLIC FILMS;

EID: 0036572564 PISSN: 00443093 EISSN: None Source Type: Journal
DOI: 10.3139/146.020401 Document Type: Article

Times cited : (2)

References (27)

1
- 0003691078
- Institute of Physics Publishing, Bristol
- (1998) Handbook of Thin Film Process Technology
- Glocker, D.A.¹ Shah, S.I.²

2
- 0003602826
- Academic Press, London
- (1992) The Materials Science of Thin Films
- Ohring, M.¹

3
- 49749218340
- (1958) Acta Metall. , vol.6 , pp. 414
- Mullins, W.W.¹

4
- 0003483502
- Grain growth and control of microstructure and texture in polycrystalline materials
- CRC Press, London
- (1997) CRC Series in Materials Science and Technology
- Novikov, V.I.¹

5
- 0009275497
- (1990) Ann. Rev. Mater. Sci. , vol.44 , pp. 657
- Thompson, C.V.¹

6
- 0002804796
- (1995) Mater. Chem. Physics , vol.41 , pp. 182
- Takewaki, T.¹ Yamada, H.² Shibata, T.³ Ohmi, T.⁴ Nitta, T.⁵

7
- 0000932552
- (1998) J. Appl. Phys. , vol.84 , pp. 5261
- Dong, L.¹ Srolovitz, D.J.²

8
- 0030286544
- (1996) Thin Solid Films , vol.288 , pp. 300
- Gotho, Y.¹ Yoshii, H.² Amioka, T.³ Kameyama, K.⁴ Tsuij, H.⁵ Ishikawa, J.⁶

9
- 0000598301
- (1997) J. Appl. Phys. , vol.82 , pp. 1397
- Karpenko, O.P.¹ Bilello, J.C.² Yalisove, S.M.³

10
- 0000713653
- (1998) Comp. Mater. Sci. , vol.12 , pp. 354
- Gilmer, G.H.¹ Huang, H.² Roland, C.³

11
- 0009111874
- (1988) J. Vac. Sci. Technol. A , vol.6 , pp. 2371
- Srolovitz, D.J.¹ Mazor, A.² Bukiet, B.G.³

12
- 0033097614
- (1999) J. Mater. Res. , vol.14 , pp. 634
- Kim, M.H.¹ Park, T.S.² Lee, D.-S.³ Yoon, E.⁴ Park, D.-Y.⁵ Woo, H.-J.⁶ Chun, D.-I.⁷ Ha, J.⁸

13
- 0344210410
- (1999) Scripta Mater. , vol.41 , pp. 709
- Greiser, J.¹ Müller, D.² Müllner, P.³ Thompson, C.V.⁴ Arzt, E.⁵

14
- 0023288698
- (1987) Scripta Metall. , vol.21 , pp. 219
- Kimura, A.¹ Birnbaum, H.K.²

15
- 0021435222
- (1984) Metal Sci. , vol.18 , pp. 265
- Bricknell, R.H.¹ Woodford, D.A.²

16
- 0003636139
- Grain boundary migration in metals
- CRC Press, London
- (1999) CRC Series in Materials Science and Technology
- Gottstein, G.¹ Shvindlerman, L.S.²

17
- 0029408288
- (1995) Mater. Sci. Eng. A , vol.203 , pp. 408
- Horton, D.¹ Thomson, C.B.² Randle, V.³

18
- 0030147755
- (1996) J. Mech. Phys. Solids , vol.44 , pp. 657
- Thompson, C.V.¹ Carel, R.²

19
- 84971957483
- (1994) J. Mater. Res. , vol.9 , pp. 2411
- Floro, J.A.¹ Thompson, C.V.² Carel, R.³ Bristowe, P.D.⁴

20
- 0032025345
- (1998) J. Mater. Res. , vol.13 , pp. 693
- Wagner, T.¹

21
- 0027593943
- (1993) Surf. Sci. , vol.289 , pp. 100
- Rodríquez, A.M.¹ Bozzolo, G.² Ferrante, J.³

22
- 0024766321
- (1989) Metall. Trans. A , vol.20 , pp. 2217
- Nix, W.D.¹

23
- 0001944110
- (1955) Proc. Phys. Soc. Lond. B , vol.68 , pp. 81
- Klerk, J.D.¹ Mugrave, J.P.²

24
- 0003371805
- Thermophysical properties of matter
- Plenum Press, New York
- (1975) Thermal Expansion , vol.12
- Touloukian, Y.S.¹

25
- 0003746634
- Noyes Publications, Park Ridge
- (1989) Handbook of Ion Beam Process Technology
- Cuomo, J.J.¹ Rossnagel, S.M.²

26
- 0004137624
- Springer, Berlin
- (1993) The Metal-Hydrogen System
- Fukai, Y.¹

27
- 0016346202
- (1974) Acta Metall. , vol.12 , pp. 1463
- Stafford, S.W.¹ McLellan, R.B.²

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