Automatic classification of singular elements for the electrostatic analysis of microelectromechanical systems

Journal of Micromechanics and Microengineering

Volumn 12, Issue 3, 2002, Pages 307-315

  Su, Y ^a   Ong, E T ^b   Lee, K H ^a,b  

^a INSTITUTE OF HIGH PERFORMANCE COMPUTING   (Singapore)

^b NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

BOUNDARY ELEMENT METHOD; COMPUTER AIDED DESIGN; COMPUTER AIDED ENGINEERING; COMPUTER SIMULATION; ELECTROSTATICS; MATHEMATICAL MODELS; PERMITTIVITY;

ELECTROSTATIC ANALYSIS;

MICROELECTROMECHANICAL DEVICES;

EID: 0036572466     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/12/3/317     Document Type: Article

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