Chemical etch studies of PtSi/p-Si(100) metal-semiconductor composite films

Materials Letters

Volumn 54, Issue 2-3, 2002, Pages 98-101

  Rahman, Abdul ^a   Bates Jr , Clayton W ^b  

^a HOWARD UNIVERSITY   (United States)

^b School of Engineering   (United States)

Author keywords

Chemical etch studies; PtSi p Si(100) composite films; Transport properties

Indexed keywords

ELECTRON TRANSPORT PROPERTIES; ETCHING; HALL EFFECT; MAGNETRON SPUTTERING; PLATINUM COMPOUNDS; SEGREGATION (METALLOGRAPHY); SEMICONDUCTING FILMS; TRANSMISSION ELECTRON MICROSCOPY;

METAL-SEMICONDUCTOR COMPOSITE FILMS;

METALLIC FILMS;

EID: 0036570958     PISSN: 0167577X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-577X(01)00544-4     Document Type: Article

References (8)