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Volumn 77, Issue 3, 2000, Pages 241-245
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Transmission electron microscopy study of PtSi/Si (p-type) composites grown on Si(111) substrates
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Author keywords
[No Author keywords available]
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Indexed keywords
AGGLOMERATION;
AMORPHOUS FILMS;
ANNEALING;
CRYSTALLINE MATERIALS;
ELECTRIC CONDUCTIVITY MEASUREMENT;
FILM GROWTH;
FILM PREPARATION;
SCHOTTKY BARRIER DIODES;
SEMICONDUCTING SILICON;
SPUTTER DEPOSITION;
SUBSTRATES;
TRANSMISSION ELECTRON MICROSCOPY;
COMPOSITE FILMS;
SEMICONDUCTING FILMS;
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EID: 0034271270
PISSN: 09215107
EISSN: None
Source Type: Journal
DOI: 10.1016/S0921-5107(00)00494-3 Document Type: Article |
Times cited : (11)
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References (16)
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