In situ diffusion measurements during RBS analysis of polymers coated with aluminium

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 190, Issue 1-4, 2002, Pages 728-731

  Mandl S ^a,b   Stritzker, B ^b   Rauschenbach, B ^a,c  

^a LEIBNIZ INSTITUTE OF SURFACE ENGINEERING IOM   (Germany)

^b UNIVERSITY OF AUGSBURG   (Germany)

^c UNIVERSITY OF LEIPZIG   (Germany)

Author keywords

Diffusion; Metal plasma immersion ion implantation and deposition; Polymers; Rutherford backscattering spectroscopy

Indexed keywords

DIFFUSION; HIGH ENERGY PHYSICS; ION IMPLANTATION; IONS; LOW TEMPERATURE EFFECTS; METALLIZING; NUCLEAR INSTRUMENTATION; RUTHERFORD BACKSCATTERING SPECTROSCOPY; THICKNESS MEASUREMENT;

PLASMA IMMERSION ION IMPLANTATION;

POLYMERS;

EID: 0036570104     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(02)00448-2     Document Type: Conference Paper

References (11)