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Volumn 190, Issue 1-4, 2002, Pages 351-356
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Micro-RBS characterisation of the chemical composition and particulate deposition on pulsed laser deposited Si1-xGex thin films
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Author keywords
Microbeam; Particulate formation; Pulsed laser deposition; RBS; Surface topography
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Indexed keywords
CHARACTERIZATION;
COMPOSITION EFFECTS;
PULSED LASER DEPOSITION;
RUTHERFORD BACKSCATTERING SPECTROSCOPY;
SEMICONDUCTING SILICON COMPOUNDS;
PARTICULATER DEPOSITION;
THIN FILMS;
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EID: 0036570018
PISSN: 0168583X
EISSN: None
Source Type: Journal
DOI: 10.1016/S0168-583X(02)00462-7 Document Type: Conference Paper |
Times cited : (16)
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References (20)
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