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Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 190, Issue 1-4, 2002, Pages 351-356

Micro-RBS characterisation of the chemical composition and particulate deposition on pulsed laser deposited Si1-xGex thin films

(2) Simon, A a Kantor Z b

a INSTITUTE OF NUCLEAR RESEARCH ATOMKI (Hungary)

b RESEARCH GROUP ON LASER PHYSICS (Hungary)

Author keywords

Microbeam; Particulate formation; Pulsed laser deposition; RBS; Surface topography

Indexed keywords

CHARACTERIZATION; COMPOSITION EFFECTS; PULSED LASER DEPOSITION; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SEMICONDUCTING SILICON COMPOUNDS;

PARTICULATER DEPOSITION;

THIN FILMS;

EID: 0036570018 PISSN: 0168583X EISSN: None Source Type: Journal
DOI: 10.1016/S0168-583X(02)00462-7 Document Type: Conference Paper

Times cited : (16)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.