A novel micro-structured reference material for microbeam analysis

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 161-163, Issue , 2000, Pages 359-365

  Wätjen, Uwe ^a   Dücsö, Csaba ^b   Tajani, Antonella ^c   Munnik, Frans ^d   Lechtenberg, Frank ^e  

^a JOINT RESEARCH CENTRE   (Italy)

^b RESEARCH INSTITUTE FOR TECHNICAL PHYSICS AND MATERIALS SCIENCE   (Hungary)

^c INTERNATIONAL ATOMIC ENERGY AGENCY   (Austria)

^d BV Cyclotron   (Netherlands)

^e Roentgen Analytik Service   (Germany)

Author keywords

Beam spot size; Certified distances; Certified reference material; Micro lithography; Microbeam profile; Permalloy; Scanning system parameters

Indexed keywords

CRYSTAL MICROSTRUCTURE; ION MICROSCOPES; LITHOGRAPHY; MICROELECTRONIC PROCESSING; NICKEL ALLOYS; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SILICON; SILICON WAFERS; SUBSTRATES; X RAYS;

BEAM SPOT SIZE; CERTIFIED DISTANCES; CERTIFIED REFERENCE MATERIAL; MICROBEAM ANALYSIS; MICROBEAM PROFILE; MICROBEAMS; MICROLITHOGRAPHY; PERMALLOY; SCANNING SYSTEM PARAMETERS;

PARTICLE BEAMS;

EID: 0042721498     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(99)00955-6     Document Type: Article

References (5)

1. F. Watt, Nucl. Instr. and Meth. B 104 (1995) 647.
2. U. Wätjen, A. Plompen, Nucl. Instr. and Meth. B 104 (1995) 166.
3. U. Wätjen, I. Bársony, G.W. Grime, I. Rajta, Nucl. Instr. and Meth. B 150 (1999) 532.
4. U. Wätjen, I. Bársony, C. Dücsö, A novel micro-structured reference material for ion and X-ray microbeam analysis, Mikrochimica Acta 132 (2-4) (2000), in press.
5. G.J.F. Legge, J.S. Laird, L.M. Mason, A. Saint, M. Cholewa, D.N. Jamieson, Nucl. Instr. and Meth. B 77 (1993) 153.