Sensitivity of a miniaturized touch probe sensor using PZT thin film vibrator

Ultrasonics

Volumn 40, Issue 1-8, 2002, Pages 61-65

  Kanda, Takefumi ^a   Kurosawa, Minoru K ^b   Higuchi, Toshiro ^a  

^a UNIVERSITY OF TOKYO   (Japan)

^b TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

Hydrothermal method; PZT thin film; Surface profile measurement; Touch probe sensor

Indexed keywords

HYDROTHERMAL SYNTHESIS; NATURAL FREQUENCIES; PIEZOELECTRIC DEVICES; PROFILOMETRY; SENSITIVITY ANALYSIS; SURFACE MEASUREMENT; THIN FILMS; TRANSDUCERS; VIBRATORS;

TOUCH PROBE SENSORS;

SENSORS;

EID: 0036566603     PISSN: 0041624X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0041-624X(02)00091-4     Document Type: Conference Paper

References (10)

1. Resonator-based touch-sensitive probe
2. A rod-shaped vibro touch sensor using PZT thin film
3. A flat type touch probe sensor using PZT thin film vibrator
4. Estimation of resolution and contact force of a longitudinally vibrating touch probe sensor using lead zirconate titanate (PZT) thin-film vibrator
5. Preparation of lead zirconate titanate thin film by hydrothermal method
6. Single process to deposit lead zirconate titanate (PZT) thin film by hydrothermal method
7. Performance of hydrothermal PZT film on high intensity operation
8. Estimation of the hydrotheramally deposited lead zirconate titanate (PZT)