Microstructure and electrical properties of nonstoichiometric strontium titanate thin films grown on platinum electrodes

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 40, Issue 3 A, 2001, Pages 1310-1314

  Morito, K ^a   Suzuki, T ^a   Fujimoto, M ^a  

^a TAIYO YUDEN CO LTD   (Japan)

Author keywords

Dielectric property; Nonstoichiometric; Perovskite; Ruddlesden popper structure; Strontium titanate

Indexed keywords

COMPOSITION EFFECTS; ELECTRIC INSULATION; ELECTRODES; FILM GROWTH; MICROSTRUCTURE; PERMITTIVITY; PEROVSKITE; PLATINUM; SILICON; SPUTTER DEPOSITION; STRONTIUM COMPOUNDS; SUBSTRATES; THERMAL EFFECTS;

INSULATIVE RESISTANCE;

THIN FILMS;

EID: 0035269924     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.40.1310     Document Type: Article

References (17)