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Volumn 110, Issue 1281, 2002, Pages 343-346
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Epitaxial growth of ZnO/AlN heterostructures on sapphire and Si substrates
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Author keywords
AlN; Epitaxial film; Interface; Molecular beam epitaxy; Sapphire; Si; SiC; Sputtering; ZnO
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Indexed keywords
CRYSTALLINE MATERIALS;
EPITAXIAL GROWTH;
INTERFACES (MATERIALS);
MOLECULAR BEAM EPITAXY;
PLASMA APPLICATIONS;
REFLECTION HIGH ENERGY ELECTRON DIFFRACTION;
SAPPHIRE;
SILICON;
TRANSMISSION ELECTRON MICROSCOPY;
X RAY DIFFRACTION ANALYSIS;
ZINC OXIDE;
EPITAXIAL FILMS;
HETEROJUNCTIONS;
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EID: 0036565146
PISSN: 09145400
EISSN: None
Source Type: Journal
DOI: 10.2109/jcersj.110.343 Document Type: Article |
Times cited : (4)
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References (14)
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