Characterization of pulsed laser deposited Ba0.6Sr0.4TiO3 on Pt-coated silicon substrates

Materials Science in Semiconductor Processing

Volumn 5, Issue 2-3, 2002, Pages 189-194

  Goux, L ^a,b   Gervais, M ^b   Gervais, F ^b   Catherinot, A ^c   Champeaux, C ^c   Sabary, F ^d  

^a STMICROELECTRONICS   (France)

^b UNIVERSITÉ DE TOURS   (France)

^c UNIVERSITY OF LIMOGES   (France)

^d CEA LE RIPAULT   (France)

Author keywords

BST; Capacitor; Dead layer; Perovskite; Pt Ti bilayer; Pulsed laser deposition

Indexed keywords

CAPACITANCE; CAPACITORS; COATINGS; CRYSTAL ORIENTATION; FERROELECTRIC MATERIALS; HEAT TREATMENT; INTERFACES (MATERIALS); MULTILAYERS; PERMITTIVITY; PLATINUM; PULSED LASER DEPOSITION; SUBSTRATES; THIN FILMS;

DEAD LAYERS;

BARIUM COMPOUNDS;

EID: 0036557703     PISSN: 13698001     EISSN: None     Source Type: Journal    
DOI: 10.1016/S1369-8001(02)00110-5     Document Type: Conference Paper

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