High aspect ratio micro actuation mechanism

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2001, Pages 582-585

  Gel, M ^a   Shimoyama, I ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; CAPACITORS; FINITE ELEMENT METHOD; MICROMACHINING; POLYIMIDES; PRECISION ENGINEERING; SILICON; SUBSTRATES;

FRICTION FREE MOTION;

MICROACTUATORS;

EID: 0035023807     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (2)