Complementary metal-oxide-semiconductor-compatible micromachined two-dimensional vertical Hall magnetic-field sensor: A modified design

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 16, Issue 2, 1998, Pages 873-875

  Kahrizi, M ^a   Paranjape, M ^b,c   Landsberger, L M ^a  

^a Gina Cody School of Engineering and Computer Science   (Canada)

^b Ist per Ric Scientifica T   (Italy)

^c UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0032372048     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.581026     Document Type: Article

References (4)

1. R. S. Popovic, IEEE Electron Device Lett. EDL-5, 357 (1984).
2. M. Paranjape, L. M. Landsberger, and M. Kahrizi, Sens. Actuators A 53, 278 (1996).
3. U. Schnakenberg, W. Benecke, and P. Lange, 6th International Conference on Solid-State Sensors and Actuators, Tech. Digest, (Transducers '91) San Francisco, CA, USA, June 24-28, 1991, pp. 815-818.
4. O. Tabata, Proceedings of the 8th International Conference on Solid State Sensors and Actuators and Eurosensors IX, 25-29 June, 1995 (Royal Swedish Academy of Engineering Sciences IVA, Sweden, 1995), pp. 83-86.