Vertical Hall magnetic field sensor using CMOS-compatible micromachining techniques

Technical Digest- IEEE Solid-State Sensor and Actuator Workshop

Volumn , Issue , 1992, Pages 32-34

  Paranjape, M ^a   Ristic, Lj ^a   Allegretto, W ^a  

^a UNIVERSITY OF ALBERTA   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS INTEGRATED CIRCUITS; MAGNETIC FIELDS; MICROMACHINING;

CMOS-COMPATIBLE MICROMACHINING TECHNIQUES; VERTICAL HALL MAGNETIC FIELD SENSOR;

SENSORS;

EID: 0026976296     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (19)