Control positioning of torsional electrostatic actuators by current driving

ASDAM 2000 - Conference Proceedings: 3rd International EuroConference on Advanced Semiconductor Devices and Microsystems

Volumn , Issue , 2000, Pages 91-94

  Nadal Guardia, R ^a,b   Aigner, R ^a   Nessler, W ^a   Handtmann, M ^a   Castaner L M ^b  

^a INFINEON TECHNOLOGIES AG   (Germany)

^b UNIVERSITAT POLITÈCNICA DE CATALUNYA   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; CAPACITANCE; ELECTROSTATICS; FLIP FLOP CIRCUITS; MICROSYSTEMS; SEMICONDUCTOR DEVICES;

CONTROL CIRCUITS; CONTROLLABLE RANGES; CURRENT DRIVING; CURRENT INJECTIONS; PARASITIC CAPACITANCE; SERIES CAPACITANCE; SWITCHED CURRENTS; SYNCHRONOUS OPERATIONS;

ELECTROSTATIC ACTUATORS;

EID: 0005719508     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ASDAM.2000.889457     Document Type: Conference Paper

References (5)

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3. J. I Seeger and S. B. Crary, Stabilization of Electrostatically Actuated Mechanical Devices. 1997 Intl. Conf. On Solid-State Sensors and Actuators (Transducers '97), Chicago, II, USA, pp. 1133-1136.
4. J. I Seeger and B. E. Boser, Dynamics and Control of Parallel-Plate Actuators beyond the Electrostatic Instability. Proc.of the 10th. Intl. Conf. On Solid-State Sensors and Actuators (Transducers '99), Sendai, Japan, 7-10 June 1999.
5. F. Plotz et al., A Low-Voltage Torsional Actuator for Application in RF-Microswitches. Proc.of the XIV European Conference on Solid-State Transducers (Eurosensors XIV), Copenhagen, Denmark, 27-30 August 2000.