Micromachined CMOS magnetic field sensor with ferromagnetic actuation

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4019, Issue , 2000, Pages 398-405

  Latorre, L ^a   Beroulle, V ^a   Bertrand, Y ^a   Nouet, P ^a   Salesse, I ^a  

^a UNIV MONTPELLIER   (France)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS INTEGRATED CIRCUITS; FERROMAGNETIC MATERIALS; INTEGRATED CIRCUIT MANUFACTURE; MAGNETIC FIELD MEASUREMENT; MICROACTUATORS; MICROMACHINING; MICROSENSORS; MONOLITHIC INTEGRATED CIRCUITS; PIEZOELECTRIC TRANSDUCERS; SEMICONDUCTOR DEVICE MODELS; STRAIN GAGES;

MAGNETIC FIELD SENSORS;

MICROELECTROMECHANICAL DEVICES;

EID: 0033719145     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)