Fabrication of biomimetic 3-D structured diaphragms

Sensors and Actuators, A: Physical

Volumn 97-98, Issue , 2002, Pages 448-456

  Yoo, K ^a,d   Gibbons, C ^b   Su, Q T ^b   Miles, R N ^b   Tien, N C ^c  

^a Cornell University   (United States)

^b STATE UNIVERSITY OF NEW YORK   (United States)

^c University of California   (United States)

^d 955 Cranbrook Ct #207 ^*  (United States)

Author keywords

3 D structured diaphragms; Biomimetic devices; Directional sensitivity; Silicon oxide blocks

Indexed keywords

ACOUSTIC VARIABLES MEASUREMENT; FABRICATION; LASER APPLICATIONS; MICROMACHINING; MICROPHONES; POLYSILICON; REACTIVE ION ETCHING; SILICON ON INSULATOR TECHNOLOGY; SILICON WAFERS; VIBRATION MEASUREMENT;

BIOMIMETIC DIRECTIONAL MICROPHONE; BIOMIMETIC THREE DIMENSIONAL STRUCTURED DIAPHRAGMS; BULK SILICON MICROMACHINING; DEEP REACTIVE ION ETCHING; LASER VIBROMETRY; PARYLENE DIAPHRAGMS; POLYSILICON DIAPHRAGMS; SILICON ON INSULATOR WAFER;

MICROELECTROMECHANICAL DEVICES;

EID: 0036544028     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(01)00808-1     Document Type: Conference Paper

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