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Volumn 25, Issue 2, 2002, Pages 163-168
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Carbonaceous alumina films deposited by MOCVD from aluminium acetylacetonate: A spectroscopic ellipsometry study
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Author keywords
Aluminium oxide; Ellipsometry; MOCVD; Optical properties
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Indexed keywords
APPROXIMATION THEORY;
CARBON;
COATINGS;
COMPUTER SIMULATION;
ELLIPSOMETRY;
METALLORGANIC CHEMICAL VAPOR DEPOSITION;
OPTICAL PROPERTIES;
REGRESSION ANALYSIS;
SECONDARY ION MASS SPECTROMETRY;
SILICON;
X RAY PHOTOELECTRON SPECTROSCOPY;
ALUMINIUM ACETYLACETONATE;
CARBONACEOUS ALUMINA FILMS;
PSEUDO-DIELECTRIC FUNCTION;
SPECTROSCOPIC ELLIPSOMETRY;
ALUMINA;
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EID: 0036541159
PISSN: 02504707
EISSN: None
Source Type: Journal
DOI: 10.1007/BF02706237 Document Type: Article |
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Times cited : (8)
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References (18)
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