|
Volumn 299-302, Issue , 2002, Pages 632-636
|
Influence of electron and proton irradiation on the electronic properties of microcrystalline silicon
a b c d
b
UNIV PARIS SUD
(France)
|
Author keywords
[No Author keywords available]
|
Indexed keywords
ANNEALING;
CRYSTALLINE MATERIALS;
DOPING (ADDITIVES);
ELECTRON IRRADIATION;
ELECTRONIC DENSITY OF STATES;
PHOTOCONDUCTIVITY;
PHOTOCURRENTS;
PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;
PROTON IRRADIATION;
HOT-WIRE CHEMICAL VAPOR DEPOSITION (HWCVD);
SILICON;
|
EID: 0036539771
PISSN: 00223093
EISSN: None
Source Type: Journal
DOI: 10.1016/S0022-3093(01)00971-1 Document Type: Article |
Times cited : (3)
|
References (22)
|