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Volumn 72, Issue 1-4, 2002, Pages 255-261
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Hydrogen passivation of defects in EFG ribbon silicon
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Author keywords
Hydrogen; Lifetime; Multicrystalline silicon; Passivation
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Indexed keywords
CRYSTAL DEFECTS;
CRYSTALLINE MATERIALS;
HYDROGEN;
HYDROGENATION;
PASSIVATION;
PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;
SILICON NITRIDE;
HYDROGEN PLASMA PASSIVATION;
SILICON;
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EID: 0036533133
PISSN: 09270248
EISSN: None
Source Type: Journal
DOI: 10.1016/S0927-0248(01)00172-6 Document Type: Conference Paper |
Times cited : (6)
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References (10)
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