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Volumn 72, Issue 1-4, 2002, Pages 255-261

Hydrogen passivation of defects in EFG ribbon silicon

Author keywords

Hydrogen; Lifetime; Multicrystalline silicon; Passivation

Indexed keywords

CRYSTAL DEFECTS; CRYSTALLINE MATERIALS; HYDROGEN; HYDROGENATION; PASSIVATION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SILICON NITRIDE;

EID: 0036533133     PISSN: 09270248     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0927-0248(01)00172-6     Document Type: Conference Paper
Times cited : (6)

References (10)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.