Stress characterization of undoped and doped laser crystallized poly-Si on different substrates using Raman spectroscopy

Journal of Non-Crystalline Solids

Volumn 299-302, Issue PART 2, 2002, Pages 778-782

  Lengsfeld, Philipp ^a   Nickel, Norbert H ^a  

^a HAHN MEITNER INSTITUT   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTALLIZATION; LASER BEAMS; RAMAN SPECTROSCOPY; STRESS ANALYSIS; SUBSTRATES; TENSILE STRESS; THERMAL EXPANSION; THERMAL STRESS;

LASER CRYSTALLIZATION;

POLYSILICON;

EID: 0036531762     PISSN: 00223093     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-3093(01)00982-6     Document Type: Article

References (16)