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Journal of the Electrochemical Society

Volumn 149, Issue 4, 2002, Pages

Adhesion of alumina particles to thin films

(4) Cooper, Kevin a,c Eichenlaub, Sean a Gupta, Anand b Beaudoin, Stephen a

a Arizona State University (United States)

b Speedfam IPEC Corporation (United States)

c MOTOROLA INC (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION; ATOMIC FORCE MICROSCOPY; CHEMICAL MECHANICAL POLISHING; COMPOSITION; COMPUTER SIMULATION; FORCE MEASUREMENT; INTEGRATED CIRCUIT MANUFACTURE; SOLUTIONS; SUBSTRATES; SURFACE ROUGHNESS; THIN FILMS; WATER;

DEIONOZED WATER; INTERACTION FORCE; INTERLAYER DIELECTRIC; ROUGHNESS DISTRIBUTION; SLURRY PARTICLES; SURFACE CHEMICAL COMPOSITION; ULTRAVIOLET LIGHT-CURED GLUE;

ALUMINA;

EID: 0036530395 PISSN: 00134651 EISSN: None Source Type: Journal
DOI: 10.1149/1.1452122 Document Type: Article

Times cited : (18)

References (30)

1
- 0032730568
- (1999) J. Electrochem. Soc. , vol.146 , pp. 376
- Stein, D.J.¹ Hetherington, D.L.² Cecchi, J.L.³

2
- 0003946537
- John Wiley & Sons, New York
- (1995) Friction and Wear of Materials, 2nd Ed.
- Rabinowicz, E.¹

3
- 0034141986
- (2000) J. Colloid Interface Sci. , vol.222 , pp. 63
- Cooper, K.¹ Ohler, N.² Gupta, A.³ Beaudoin, S.⁴

4
- 0034663976
- (2000) J. Colloid Interface Sci. , vol.228 , pp. 213
- Cooper, K.¹ Gupta, A.² Beaudoin, S.³

5
- 0035864479
- (2000) J. Colloid Interface Sci. , vol.234 , pp. 284
- Cooper, K.¹ Gupta, A.² Beaudoin, S.³

6
- 0006145551
- (2001) J. Electrochem. Soc. , vol.148
- Cooper, K.¹ Gupta, A.² Beaudoin, S.³

7
- 0026896658
- (1992) Langmuir , vol.8 , pp. 1831
- Ducker, W.A.¹ Senden, T.J.²

8
- 0027540056
- (1993) Rev. Sci. Instrum. , vol.64 , pp. 403
- Cleveland, J.P.¹ Manne, S.² Bocek, D.³ Hansma, P.K.⁴

9
- 0003508875
- John Wiley & Sons, New York
- (1997) Chemical Mechanical Planarization of Microelectronic Materials
- Steigerwald, J.M.¹ Murarka, S.P.² Gutmann, R.J.³

10
- 0003486756
- John Wiley & Sons, New York
- (1997) Design and Analysis of Experiments, 4th Ed.
- Montgomery, D.C.¹

11
- 0003745040
- NACE Houston, TX
- (1975) Atlas of Electrochemical Equilibria in Aqueous Solution
- Pourbaix, M.¹

12
- 0029389318
- (1995) Thin Solid Films , vol.266 , pp. 238
- Carpio, R.¹ Farkas, J.² Jairath, R.³

13
- 0032644218
- (1999) J. Electrochem. Soc. , vol.146 , pp. 1442
- Zhang, L.¹ Raghavan, S.² Meikle, S.³ Hudson, G.⁴

14
- 0028573843
- (1994) Mater. Res. Soc. Symp. Proc. , vol.337 , pp. 89
- Tomozawa, M.¹ Yang, K.² Li, H.³ Murarka, S.P.⁴

15
- 0031173556
- (1997) Solid State Technol. , vol.40 , pp. 169
- Tomozawa, M.¹

16
- 0030564072
- (1995) J. Non-Cryst. Solids , vol.201 , pp. 177
- Davis, K.M.¹ Tomozawa, M.²

17
- 0033116344
- (1999) Electrochem. Solid-State Lett. , vol.2 , pp. 172
- Lee, K.T.¹ Raghavan, S.²

18
- 0018302032
- John Wiley & Sons, New York
- (1979) The Chemistry of Silica
- Iler, R.K.¹

19
- 0027187086
- (1993) Jpn. J. Appl. Phys., Part 2 , vol.32
- Kobayashi, H.¹ Ryuta, T.² Shingyouji, T.³ Shimanuki, Y.⁴

20
- 0033116344
- (1999) Electrochem. Solid-State Lett. , vol.2 , pp. 172
- Lee, K.T.¹ Raghavan, S.²

21
- 0025417082
- (1990) J. Non-Cryst. Solids , vol.120 , pp. 152
- Cook, L.M.¹

22
- 0032644218
- (1999) J. Electrochem. Soc. , vol.146 , pp. 1442
- Zhang, L.¹ Raghavan, S.² Meikle, S.³ Hudson, G.⁴

23
- 0001558780
- (1995) Solid State Technol. , vol.38 , pp. 109
- Krusell, W.C.¹ Larios, J.M.² Zhang, J.³

24
- 0029392091
- (1995) Solid State Technol. , vol.38 , pp. 59
- Myers, T.L.¹ Fury, M.A.² Krusell, W.C.³

25
- 0032135967
- (1998) J. Electrochem. Soc. , vol.145 , pp. 2718
- Lillard, R.S.¹ Kanner, G.S.² Butt, D.P.³

26
- 0001151402
- (1998) J. Phys. Chem. A , vol.102 , pp. 9501
- Kanner, G.S.¹ Butt, D.P.²

27
- 0022633224
- (1986) Parasitology , vol.92 , pp. 13
- Coombs, G.H.¹ Tetley, L.² Moss, V.A.³ Vickerman, K.⁴

28
- 0029940249
- (1996) J. Colloid Interface Sci. , vol.179 , pp. 460
- Ackler, H.D.¹ French, R.² Chiang, Y.M.³

29
- 0004130701
- VCH Publishers, New York
- (1994) The Colloidal Domain
- Evans, D.F.¹ Wennerstrom, H.²

30
- 0022122174
- (1985) J. Electrochem. Soc. , vol.132 , pp. 2208
- Bowling, R.A.¹

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