High-throughput GaP microprobe array having uniform aperture size distribution for near-field optical memory

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 41, Issue 4, 2002, Pages 2034-2039

  Kurihara, Kazuma ^a   Kim, Young Joo ^a   Goto, Kenya ^a  

^a TOKAI UNIVERSITY   (Japan)

Author keywords

Aperture; GaP wet etching; High density optical recording; Microfabrication; Microprobe array; Near field optical memory; Optical array head; Vertical cavity surface emitting laser (VCSEL)

Indexed keywords

ARRAYS; DATA TRANSFER; ETCHING; LIGHT INTERFERENCE; MICROSCOPIC EXAMINATION; REFRACTIVE INDEX; SEMICONDUCTING GALLIUM COMPOUNDS;

GALLIUM PHOSPHIDE; ION MILLING; MICROPROBE ARRAY; VERTICAL CAVITY SURFACE EMITTING LASER;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0036529233     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.41.2034     Document Type: Article

References (15)