Subwavelength-sized phase-change recording with a silicon planar apertured probe

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3791, Issue , 1999, Pages 76-84

  Yatsui, Takashi ^a   Kourogi, Motonobu ^a   Tsutsui, Kazuo ^a   Takahashi, Jun ichi ^a   Ohtsu, Motoichi ^a  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ETCHING; OPTICAL DATA STORAGE; SILICON ON INSULATOR TECHNOLOGY; SUBSTRATES;

ANISOTROPICAL ETCHING; ANODIC BONDING; PHASE CHANGE RECORDING; PLANAR APERTURED PROBE ARRAY;

OPTICAL RECORDING;

EID: 0033337471     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (13)