Fabrication of micro-pyramidal probe array with aperture for near-field optical memory applications

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 39, Issue 3 B, 2000, Pages 1538-1541

  Kim, Young Joo ^a   Kurihara, Kazuma ^a   Suzuki, Kazuhiro ^a   Nomura, Mitsuru ^a   Mitsugi, Satoshi ^a   Chiba, Masafumi ^a   Goto, Kenya ^a  

^a TOKAI UNIVERSITY   (Japan)

Author keywords

High density optical recording; Microaperture; Microfabrication; Near field optical memory; Optical array head; Silicon etching; Silicon nitride; Silicon oxide; Vertical cavity surface emitting laser (VCSEL)

Indexed keywords

DEPOSITION; ETCHING; LASER RECORDING; MICROMACHINING; PHOTOLITHOGRAPHY; SEMICONDUCTING SILICON; SEMICONDUCTOR LASERS; SILICA; SILICON NITRIDE; THERMOOXIDATION; THIN FILMS;

MICROPYRAMIDAL PROBE ARRAYS; OPTICAL ARRAY HEADS; VERTICAL CAVITY SURFACE EMITTING LASERS (VCSEL);

OPTICAL DATA STORAGE;

EID: 0033749929     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.39.1538     Document Type: Article

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