Preparation of crystalline TiC thin films grown by pulsed Nd:YAG laser deposition using Ti target in methane gas

Materials Characterization

Volumn 48, Issue 2-3, 2002, Pages 221-228

  Suda, Yoshiaki ^a   Kawasaki, Hiroharu ^a   Doi, Kazuya ^a   Nanba, Jun ^a   Ohshima, Tamiko ^b  

^a SASEBO NATIONAL COLLEGE OF TECHNOLOGY   (Japan)

^b KUMAMOTO UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; CRYSTALLINE MATERIALS; FILM GROWTH; LIGHT EMISSION; NEODYMIUM LASERS; PULSED LASER DEPOSITION; THIN FILMS; X RAY DIFFRACTION ANALYSIS;

CRYSTALLINE THIN FILMS;

TITANIUM CARBIDE;

EID: 0036526236     PISSN: 10445803     EISSN: None     Source Type: Journal    
DOI: 10.1016/S1044-5803(02)00243-7     Document Type: Conference Paper

References (18)

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3. 2-Ar atmosphere
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7. Elastic properties of substoichiometric titanium carbides: Comparison of FP-LMTO calculation and experimental results
8. Tribological behavior of TiC thin films grown by pulsed laser deposition (PLD)
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14. Chromium carbide thin films synthesized by pulsed Nd:YAG laser deposition
15. Effects of r.f. bias on cubic BN film synthesis by pulsed Nd:YAG laser deposition
16. Pulsed laser deposition of carbon nitride thin films from graphite targets
17. Crystalline silicon nitride thin films grown by pulsed YAG laser deposition