Effects of r.f. bias on cubic BN film synthesis by pulsed Nd:YAG laser deposition

Thin Solid Films

Volumn 281-282, Issue 1-2, 1996, Pages 324-326

  Suda, Y ^a   Nakazono, T ^a   Ebihara, K ^b   Baba, K ^c  

^a SASEBO NATIONAL COLLEGE OF TECHNOLOGY   (Japan)

^b KUMAMOTO UNIVERSITY   (Japan)

^c Technology Center of Nagasaki   (Japan)

Author keywords

Auger electron spectroscopy; Boron nitride; Fourier transform infrared spectroscopy (FTIR)

Indexed keywords

ABSORPTION SPECTROSCOPY; AUGER ELECTRON SPECTROSCOPY; CUBIC BORON NITRIDE; DEPOSITION; FOURIER TRANSFORM INFRARED SPECTROSCOPY; ION BOMBARDMENT; LIGHT EMISSION; NEODYMIUM LASERS; OPTICAL VARIABLES MEASUREMENT; PULSED LASER APPLICATIONS; SPECTRUM ANALYSIS; SYNTHESIS (CHEMICAL);

NEGATIVE SELF BIAS; OPTICAL EMISSION SPECTRUM; PULSED LASER DEPOSITION; RADIO FREQUENCY BIAS EFFECTS;

THIN FILMS;

EID: 0030218710     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/0040-6090(96)08635-X     Document Type: Article

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