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Volumn 11, Issue 3-6, 2002, Pages 1205-1209
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Micro-structural analysis of carbon nitride (CNx) film prepared by ion beam assisted magnetron sputtering
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Author keywords
Amorphous carbon; Ion assisted deposition; Microstructure; Nitrogen
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Indexed keywords
CARBON NITRIDE;
CHEMICAL BONDS;
COMPOSITION;
DEPOSITION;
ION BEAMS;
MAGNETRON SPUTTERING;
NITROGEN;
TRANSMISSION ELECTRON MICROSCOPY;
STRUCTURAL TRANSITIONS;
THIN FILMS;
CARBON NITRIDE;
NITROGEN;
CARBON NITRIDE;
FILM;
BINDING AFFINITY;
ENERGY;
FILM;
HYBRIDIZATION;
ION BEAM ASSISTED MAGNETRON SPUTTERING;
MECHANICAL PROPERTY;
TRANSMISSION ELECTRON MICROSCOPY;
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EID: 0036508151
PISSN: 09259635
EISSN: None
Source Type: Journal
DOI: 10.1016/S0925-9635(02)00019-5 Document Type: Article |
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Times cited : (7)
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References (10)
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