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Diamond and Related Materials

Volumn 11, Issue 3-6, 2002, Pages 1227-1233

Substrate bias effect on amorphous nitrogenated carbon films deposited by filtered arc deposition

(5) Li, Yan Way a Shue, Yew Bin a Chen, Chia Fu a Yu, Teng Chien b Chang, Jack Jyh Kau b

a NATIONAL CHIAO TUNG UNIVERSITY (Taiwan)

b Trace Storage Technology Corp (Taiwan)

Author keywords

Amorphous carbon; Bias; Filtered arc deposition; Hardness; Nitrogen

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; CARBON; CHEMICAL BONDS; COMPOSITION; DEPOSITION; NITROGEN; RAMAN SPECTROSCOPY;

FILTERED ARC DEPOSITION; NANOINDENTATION SYSTEM (NIS);

AMORPHOUS FILMS;

CARBON; DEPOSITION; DISK DRIVE; FILM; HARDNESS; MAGNETIC DISC;

EID: 0036508126 PISSN: 09259635 EISSN: None Source Type: Journal
DOI: 10.1016/S0925-9635(01)00624-0 Document Type: Article

Times cited : (5)

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