An energy spread correction for depth profiling by elastic recoil detection analysis

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 187, Issue 3, 2002, Pages 383-392

  Verda, R D ^a   Tesmer, J R ^a   Nastasi, M ^a   Bower, R W ^b  

^a LOS ALAMOS NATIONAL LABORATORY   (United States)

^b UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Calibration standards; Depth profiling; Energy spread

Indexed keywords

HYDROGEN; ION BEAMS; METAL FOIL; SPECTRUM ANALYSIS;

ELASTIC RECOIL DETECTION ANALYSIS (ERDA); HYDROGEN DEPTH PROFILING;

PROFILOMETRY;

EID: 0036498281     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(01)01138-7     Document Type: Article

References (13)