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Volumn 151-152, Issue , 2002, Pages 165-169
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Characterization of amorphous hydrogenated carbon films deposited from CO-C2H2 mixtures in a distributed ECR plasma reactor
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Author keywords
Carbon films; Characterization; Plasma
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Indexed keywords
CARBON;
CHEMICAL BONDS;
COBALT;
ELECTRON CYCLOTRON RESONANCE;
HYDROGENATION;
INFRARED SPECTROSCOPY;
PLASMA APPLICATIONS;
RAMAN SPECTROSCOPY;
SUBSTRATES;
X RAY PHOTOELECTRON SPECTROSCOPY;
AMORPHOUS HYDROGENATED CARBON FILMS;
PLASMA REACTORS;
AMORPHOUS FILMS;
CARBON;
HYDROXYL GROUP;
SILICON;
CARBON MONOXIDE;
DEPOSITION;
ETHYLENE;
FILM;
ABSORPTION SPECTROSCOPY;
ATOM;
CHEMICAL BOND;
ELECTRON CYCLOTRON RESONANCE;
FILM;
HYBRIDIZATION;
INSTRUMENT;
NUCLEAR PHYSICS;
RAMAN SPECTROMETRY;
REACTOR;
X RAY PHOTOELECTRON SPECTROSCOPY;
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EID: 0036494932
PISSN: 02578972
EISSN: None
Source Type: Journal
DOI: 10.1016/S0257-8972(01)01562-6 Document Type: Article |
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Times cited : (7)
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References (12)
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