Plasma diagnostics of CH4/O2/H2 electron cyclotron resonance plasma with permanent magnets and deposition of amorphous carbon

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 38, Issue 7 B, 1999, Pages 4200-4205

  Yasui, Toshiaki ^a   Kodera, Hidekazu ^a   Oya, Izumi ^a   Tahara, Hirokazu ^a   Yoshikawa, Takao ^a  

^a OSAKA UNIVERSITY   (Japan)

Author keywords

Actinometry; Amorphous carbon; Diamond like carbon; ECR plasma; Optical emission spectroscopy; Plasma CVD

Indexed keywords

AMORPHOUS MATERIALS; CARBON; ELECTRON CYCLOTRON RESONANCE; EMISSION SPECTROSCOPY; GROUND STATE; HYDROGEN; METHANE; OXYGEN; PERMANENT MAGNETS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; PLASMA SOURCES; RAMAN SPECTROSCOPY;

ACTINOMETRY; AMORPHOUS CARBON; DIAMOND LIKE CARBON; MICROCRYSTALLINE CARBON;

PLASMA DIAGNOSTICS;

EID: 0033350685     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.38.4200     Document Type: Article

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