SCOPUS 정보 검색 플랫폼

Physica E: Low-Dimensional Systems and Nanostructures

Volumn 13, Issue 2-4, 2002, Pages 473-476

Investigation of nano-electromechanical-systems using surface acoustic waves

(3) Beil, F W a Wixforth, A a Blick, R H a

a UNIVERSITY OF MUNICH (Germany)

Author keywords

Nano electromechanical systems (NEMS); Sensors; Surface acoustic wave (SAW)

Indexed keywords

ACOUSTIC WAVES; EIGENVALUES AND EIGENFUNCTIONS; ELECTRON RESONANCE; FINITE ELEMENT METHOD; QUANTUM THEORY; SEMICONDUCTING GALLIUM ARSENIDE; SURFACE WAVES;

NANO-ELECTROMECHANICAL-SYSTEMS (NEMS);

ELECTROMECHANICAL DEVICES;

EID: 0036492864 PISSN: 13869477 EISSN: None Source Type: Journal
DOI: 10.1016/S1386-9477(02)00173-X Document Type: Conference Paper

Times cited : (14)

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