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Applied Physics A: Materials Science and Processing

Volumn 74, Issue 2, 2002, Pages 217-224

Simulation of polycrystalline 3D film growth: An investigation of the evolution of grain size and texture in diamond films

(3) Jiang, X a Yu, G b Lee, S T b

a FRAUNHOFER INSTITUTE FOR SURFACE ENGINEERING AND THIN FILMS IST (Germany)

b CITY UNIVERSITY OF HONG KONG (Hong Kong)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; COALESCENCE; COMPUTER SIMULATION; FILM GROWTH; GRAIN SIZE AND SHAPE; MATHEMATICAL MODELS; NUCLEATION; POLYCRYSTALLINE MATERIALS; TEXTURES; THICKNESS MEASUREMENT;

NUCLEI; ORIENTATIONAL DIFFERENCE;

DIAMOND FILMS;

EID: 0036477491 PISSN: 09478396 EISSN: None Source Type: Journal
DOI: 10.1007/s003390100869 Document Type: Article

Times cited : (9)

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