Reflection of infrared radiation from lamellar gratings on a silicon wafer: Spectroscopy of nonspecular orders

Journal of Applied Physics

Volumn 91, Issue 3, 2002, Pages 939-942

  Hava, S ^a   Ivri, J ^a   Auslender, M ^a  

^a BEN GURION UNIVERSITY OF THE NEGEV   (Israel)

Author keywords

[No Author keywords available]

Indexed keywords

EXPERIMENTAL DATA; GRATING EQUATIONS; INCIDENT BEAMS; LAMELLAR GRATINGS; RIGOROUS DIFFRACTION THEORY; SPECTRAL EFFICIENCIES; WAVELENGTH RANGES;

ACCIDENTS; INFRARED RADIATION; SILICON WAFERS; SPECTRUM ANALYZERS; WAVELET ANALYSIS;

DIFFRACTION GRATINGS;

EID: 0036469628     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1430538     Document Type: Article

References (7)

1. S. Hava, J. Ivri, and M. Auslender, J. Appl. Phys. 85, 7893 (1999). jap JAPIAU 0021-8979
2. M. Born and E. Wolf, Principles of Optics, 6th ed. (Pergamon Oxford 1980).
3. E.g., N. C. Gallagher, in Theory, Design and Fabrication of Gratings, Zone Plates and Binary Optics, Short Lecture Notes (SPIE, Bellingham, WA, 1996).
4. Electromagnetic Theory of Gratings, edited by R. Petit (Springer, Berlin, 1980).
5. S. Hava, J. Ivry, M. Auslender, and B. M. Lacquet, J. Appl. Phys. 83, 1654 (1998). jap JAPIAU 0021-8979
6. S. Hava and M. Auslender, Infrared Phys. Technol. 41, 149 (2000). ipt IPTEEY 1350-4495
7. G. Strang and T. Nguen, Wavelets and Filter Banks (Wesley-Cambridge, New York, 1996).