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Volumn 85, Issue 11, 1999, Pages 7893-7898
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Reflection of infrared radiation from lamellar gratings on a silicon wafer
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Author keywords
[No Author keywords available]
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Indexed keywords
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EID: 0042760484
PISSN: 00218979
EISSN: None
Source Type: Journal
DOI: 10.1063/1.370603 Document Type: Article |
Times cited : (11)
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References (13)
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