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Volumn 297, Issue 2-3, 2002, Pages 247-253
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EPR spectra of amorphous silicon nitride films grown by low-temperature PECVD
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Author keywords
[No Author keywords available]
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Indexed keywords
DEFECTS;
FILM GROWTH;
HAMILTONIANS;
LOW TEMPERATURE OPERATIONS;
PARAMAGNETIC RESONANCE;
PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;
SILICON NITRIDE;
SPECTRUM ANALYSIS;
HYPERFINE STRUCTURES (HFS);
AMORPHOUS FILMS;
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EID: 0036469068
PISSN: 00223093
EISSN: None
Source Type: Journal
DOI: 10.1016/S0022-3093(01)00934-6 Document Type: Article |
Times cited : (6)
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References (19)
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