SCOPUS 정보 검색 플랫폼

Journal of Non-Crystalline Solids

Volumn 297, Issue 2-3, 2002, Pages 247-253

EPR spectra of amorphous silicon nitride films grown by low-temperature PECVD

(6) Bogomolova, L D a Jachkin, V A a Prushinsky, S A a Stryahilev, D b Sazonov, A b Nathan, A b

a MOSCOW STATE UNIVERSITY (Russian Federation)

b UNIVERSITY OF WATERLOO (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

DEFECTS; FILM GROWTH; HAMILTONIANS; LOW TEMPERATURE OPERATIONS; PARAMAGNETIC RESONANCE; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SILICON NITRIDE; SPECTRUM ANALYSIS;

HYPERFINE STRUCTURES (HFS);

AMORPHOUS FILMS;

EID: 0036469068 PISSN: 00223093 EISSN: None Source Type: Journal
DOI: 10.1016/S0022-3093(01)00934-6 Document Type: Article

Times cited : (6)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.