Metal organic chemical vapor deposition growth of epitaxial SrRuO3 and CaRuO3 thin films with different orientations as the bottom electrode for epitaxial ferroelectric thin film

Journal of Crystal Growth

Volumn 235, Issue 1-4, 2002, Pages 401-406

  Funakubo, Hiroshi ^a   Oikawa, Takahiro ^a   Higashi, Noriyuki ^a   Saito, Keisuke ^b  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

^b PHILIPS RESEARCH LABORATORIES   (Germany)

Author keywords

A1. Crystal structure; A3. Chemical vapor deposition; B1. Inorganic compounds; B1. Oxides

Indexed keywords

CRYSTAL ORIENTATION; ELECTRIC CONDUCTIVITY; ELECTRODES; EPITAXIAL GROWTH; FILM GROWTH; METALLORGANIC CHEMICAL VAPOR DEPOSITION; OXIDES; STRONTIUM COMPOUNDS; SUBSTRATES;

EPITAXIAL FILMS;

FERROELECTRIC THIN FILMS;

EID: 0036467217     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-0248(01)01921-2     Document Type: Article

References (12)