Microfabrication and scale effect studies for a magnetic micromanipulation system

IEEE International Conference on Intelligent Robots and Systems

Volumn 2, Issue , 2002, Pages 1754-1759

  Gauthier, Michaël ^a   Piat, Emmanuel ^a  

^a FEMTO ST INSTITUTE   (France)

Author keywords

[No Author keywords available]

Indexed keywords

MAGNETIC DEVICES; MICROELECTROMECHANICAL DEVICES; MICROELECTRONIC PROCESSING; NICKEL; SEMICONDUCTOR DEVICE MANUFACTURE;

MAGNETIC FORCE; MAGNETIC MICROMANIPULATION SYSTEM; MICROFABRICATION; SCALE EFFECTS;

MICROMANIPULATORS;

EID: 0036448850     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (15)

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