Influence of electrodes and Bragg reflector on the quality of thin film bulk acoustic wave resonators

Proceedings of the Annual IEEE International Frequency Control Symposium

Volumn , Issue , 2002, Pages 45-49

  Lee, S H ^a,c   Kim, J H ^a   Mansfeld, G D ^b   Yoon, K H ^c   Lee, J K ^a  

^a Korea Institute of Science and Technology   (South Korea)

^b INSTITUTE OF RADIO ENGINEERING AND ELECTRONICS   (Russian Federation)

^c Yonsei University   (South Korea)

Author keywords

AlN; Bragg reflector; FBAR; Scattering loss

Indexed keywords

ACOUSTIC BULK WAVE DEVICES; ATTENUATION; ELECTRIC IMPEDANCE; ELECTRODES; PIEZOELECTRIC DEVICES; SURFACE ROUGHNESS; THIN FILMS;

BRAGG REFLECTORS;

ACOUSTIC RESONATORS;

EID: 0036438439     PISSN: 01616404     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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