Correlative stitching interferometer and its key techniques

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4777, Issue , 2002, Pages 382-393

  Yu, Yingjie ^a   Chen, Mingyi ^a  

^a SHANGHAI UNIVERSITY   (China)

Author keywords

Profile measurement; Stitching algorithm; Stitching interferometer; System error reduction

Indexed keywords

ALGORITHMS; OPTICAL RESOLVING POWER; PHASE SHIFT; WAVEFRONTS;

CORRELATIVE STITCHING INTERFEROMETERS;

INTERFEROMETERS;

EID: 0036421555     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.472238     Document Type: Conference Paper

References (18)

1. Aikens D.M., "The origin and evolution of the optics specifications for the national ignition facility", Proc. SPIE, 2536, pp.2-12, 1995.
2. Lawson J.K., "Specification of optical components using the power spectral density unction", Proc. SPIE, 2536, pp.38-50, 1995.
3. Mingyi Chen, et al. "Multi-aperture overlap-scanning technique for large aperture test", Proc. SPIE, 1553, pp.626-635, 1991.
4. Michael Bray, "Stitching interferometry for large plano optics using standard interferometer", Proc. SPIE, 3134, pp.: 39-50, 1997.
5. Michael Bray, "Stitching interferometry: how and why it works", Proc. SPIE, 3739, pp.259-273, 1999.
6. Michael Bray, "Stitching Interferometry and absolute surface shape metrology:similarities", Proc. SPIE, 4451, pp.40:46, 2001.
7. Michael Bray, Stitching interferometry for the wavefront metrology of X-ray mirrors, Proc. SPIE, 4501, pp.7-11, 2001.
8. Shouhong Tang, "Stitching: High spatial resolution surface measurements over large areas",Proc. SPIE, 3479,pp. 43-49, 1998.
9. Weiming Cheng, Mingyi Chen, "Transformation and connection of subapertures in the multi-aperture overlap scanning technique for large optics tests", Opt. Eng. 32, pp. 1947-1950, 1993.
10. M. Otsubo, K. Okada, "Measurement of large plane surface shapes by connecting small-aperture interferograms", Opt. Eng. 33, pp. 608-613, 1994.
11. Guo Hongwei, Chen Mingyi, "An iterative algorithm of multi-Aperture transformation and connectioin technique in cylindrical coordinates", Acta Optica Sinica(in Chinese), 20, pp. 1047-1052, 2000.
12. James C. Wyant, "Absolute optical testing: Better accuracy than the reference",Photonics Spectra, March, pp.97-101, 1991.
13. Chiayu Ai, James C. Wyant, "Absolute testing of the flats decomposed to even and odd functions", Proc. SPIE, 1776, pp.73-83, 1992.
14. ISO 10110, "Optics and optical instruments-Preparation of drawings for optical elements and systems-Part 8:Surface Texture", 1997.
15. Katsuyuki Okada, Atsushi Sato, and Jumpei Tsujiuchi, "Simultaneous Calculation of Phase distribution and scanning phase shifting interferometry", Opt. Comm, 84, pp. 118-124, 1991.
16. In-Bok Kong and Seung-Woo Kim, "General algorithm of phase-shifting interferometry by iterative least squares fitting", Opt. Eng, 34, 183-187, 1995.
17. Chunlong Wei, Mingyi Chen and Zhijiang Wang, "General phase-stepping algorithm with automatic calibration of phase steps", Opt. Eng. 38, pp. 1357-1360, 1999.
18. Yingjie Yu, Chunlong Wei, "Effective error reduction method in phase-shifting interferometer",Proc. SPIE. 4110, PP. 283-290, 2000.